Design, Test, and Microfabrication of MEMS and MOEMS Design

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Design, Test, and Microfabrication of MEMS and MOEMS Design

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Design, Test, and Microfabrication of MEMS and MOEMS Design, Characterization, and Packaging for MEMS and Microelectronics Design, Test, Integration and Packaging of MEMS/MOEMS MEMS Reliability for Critical Applications Design, Modeling, and Simulation in Microelectronics MEMS Design, Fabrication, Characterization, and Packaging Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 Reliability, Testing, and Characterization of MEMS/MOEMS

Design, Test, and Microfabrication of MEMS and MOEMS
Joint Invited Papers
MEMS for space applications
Linda Miller, [1999]
Physical modeling and simulation of microdevices and microsystems
Gerhard Wachutka, [1999]
Design of MEMS and microsystems
David Nagel, [1999]
III-V semiconductor-based MOEMS
Pierre Viktorovitch, [1999]
Surface normal optical MEMS in dynamic WDM transport networks
James Walker, Joseph Ford, Keith Goossen, David Bishop, Dennis Greywall, Vladimir Aksyuk, [1999]
Prospective MEMS applications at NEC
Kenichiro Suzuki, [1999]
CAD, Design and Test Test and Optimization
MEMS resonator synthesis for testability
Nilmoni Deb, Sitaraman Iyer, Tamal Mukherjee, Ronald Blanton, [1999]
Fault simulation of MEMS using HDLs
Benoit Charlot, Salvador Mir, Erika Cota, Marcelo Lubaszewski, Bernard Courtois, [1999]
Testing philosophy behind the micro analysis system
Hans Kerkhoff, [1999]
MEMS optimization incorporating genetic algorithms
Gregory Kirkos, Robert Jurgilewicz, Stephen Duncan, [1999]
Automatic evaluation of a sensor's geometrical parameters
Jean Blanc, Marc Belleville, Fabien Mieyeville, Hubert Bono, [1999]
Emerging CAD Methods
Coupling of length scales and atomistic simulation of MEMS resonators
Robert Rudd, Jeremy Broughton, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) Emerging CAD Methods (cont.)
Extraction of compact models for MEMS/MOEMS package-device codesign
Vladimir Rabinovich, Joost Van Kuijk, Susan Zhang, Stephen Bart, John Gilbert, [1999]
Effects of capacitors, resistors, and residual charges on the static and dynamic performance of electrostatically actuated devices
Edward Chan, Robert Dutton, [1999]
Optimization of cantilever probes for atomic force microscopy
Niels Pedersen, [1999]
CAD Systems I
Correct-by-construction approach to MEMS design and analysis
Barry Dyne, David Bernstein, [1999]
Computational simulation of microfluidics, electrokinetics, and particle transport in biological MEMS devices
M. Giridharan, Soumya Krishnamoorthy, Anantha Krishnan, [1999]
Advanced integrated solution for MEMS design
K. Liateni, David Moulinier, Bachar Affour, H. Boutamine, Jean Michel Karam, D. Veychard, Bernard Courtois, Ariel Cao, [1999]
Integrated CAD tools for top-down design of MEMS/MOEMS systems
Bart Romanowicz, Stephen Bart, John Gilbert, [1999]
General contact and hysteresis analysis of multidielectric MEMS devices under thermal and electrostatic actuation
Yie He, James Marchetti, Carlos Gallegus, [1999]
Simulation of nonideal behavior in integrated piezoresistive silicon pressure sensors
Stefan Finkbeiner, Jochen Franz, Stefan Hein, Andreas Junger, Joerg Muchow, Berhard Opitz, Wolfgang Romes, Oliver Schatz, Hans Trah, [1999]
Fabrication of a smart monolithic 2D quartz microscanner
Moussa Hoummady, L. Majewski, V. Robert, C. Bonjour, B. Chahboune, [1999]
Design of a pigtailed tunable filter for optical fiber transmissions at 1.3 to 1.55 ┬Ám
Jean-Philippe Gouy, A. Tixier, Gen Hashiguchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) Design (cont.)
Modeling and optimization of microcoils for telemetric transmission at frequencies up to 20 MHz
Sven Rehfuss, Claudia Marschner, Karl-Ludwig Krieger, Marcus Weser, Rainer Laur, [1999]
Evaporating two-phase flow mechanism in microchannels
Yoav Peles, Leonid Yarin, Gad Hetsroni, [1999]
CAD Systems II
Modeling and simulating optical MEMS using Chatoyant
Timothy Kurzweg, Steven Levitan, Philippe Marchand, Jose Martinez, Kurt Prough, Donald Chiarulli, [1999]
Interoperation of heterogeneous CAD tools in Ptolemy II
Jie Liu, Bicheng Wu, Xiaojun Liu, Edward Lee, [1999]
Structured CAD methodology for integrated MEMS and IC design
Linh Nguyen, Hee Jung Lee, Mary Ann Perez-Maher, Ying Xu, [1999]
Computational design of membrane pumps with active/passive valves for microfluidic MEMS
Andrzej Przekwas, H. Yang, Mahesh Athavale, [1999]
SUNRED: a new field solving approach
Vladimir Szekely, A. Pahi, Marta Rencz, [1999]
Computer-aided design tools for economical MEMS fabrication processes
Christian Schneider, Andreas Priebe, Rainer Brueck, Kai Hahn, [1999]
Providing technology infrastructure for MEMS
Renato Ribas, D. Veychard, Jean Michel Karam, Bernard Courtois, [1999]
Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations
Zeljko Mrcarica, Vladimir Risojevic, Michel Lenczner, Mirko Jakovljevic, Vanco Litovski, [1999]
Internet MEMS design tools based on component technology
Rainer Brueck, Christian Schumer, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) Poster Papers: CAD, Design and Test
CFD-ACE+: a CAD system for simulation and modeling of MEMS
Phillip Stout, H. Yang, Paul Dionne, Andy Leonard, Zhiqiang Tan, Andrzej Przekwas, Anantha Krishnan, [1999]
Advanced 3D-CAD interface for micromachining with excimer lasers
Hans Toenshoff, Ferdinand von Alvensleben, Christian Kulik, [1999]
SPICE models for simulating BDJ and BTJ detectors
Annick Alexandre, Guo Lu, Mohamed Sedjil, [1999]
Design and implementation of integrated BDJ detector in a standard CMOS technology
Guo Lu, Gerard Sou, Mohamed Ben Chouikha, Mohamed Sedjil, [1999]
Mechanical-thermal simulation of surface-micromachined polysilicon hot plates
Mihail Dumitrescu, Corbel Cobianu, Dan Dascalu, Adrian Pascu, [1999]
Numeric investigation of vibrating microcantilever using Matlab/Simulink
Arturas Ulcinas, Valentinas Snitka, Mindaugas Rackaitis, [1999]
Lumped-parameter model for a micropump based on the magnetohydrodynamic (MHD) principle
Lei Huang, Wanjun Wang, Michael Murphy, [1999]
Modeling of BDJ and BTJ structures for color detection
Mohamed Sedjil, Guo Lu, Mohamed Ben Chouikha, Annick Alexandre, [1999]
Fault modeling of electrostatic comb-drives for MEMS
Benoit Charlot, Spiridon Moussouris, Salvador Mir, Bernard Courtois, [1999]
Design of spatial light modulator microdevices: microslit arrays
Rainer Riesenberg, Thomas Seifert, [1999]
From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator
F. Oms-Elisabelar, Christian Bergaud, L. Nicu, [1999]
Design and sensitivity optimization of vibration sensors for tool-state monitoring
Jochen Thomas, Ralf Kuehnhold, Heiner Ryssel, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) Poster Papers: CAD, Design and Test (cont.)
Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems (MEMS)
Andrzej Przekwas, [1999]
Hollow glass for insulating layers
Andreea Merticaru, Gabriel Moagar-Poladian, [1999]
Micromachining and Microfabrication Mechanical and Eletrochemical Micromachining and Micromolding
Manufacturing of microstructures using ultraprecision machine tools
Manfred Weck, Stephan Fischer, [1999]
Innovative molding technologies for the fabrication of components for microsystems
Volker Piotter, Tobias Benzler, Thomas Hanemann, Heinz Woellmer, Robert Ruprecht, Juergen Hausselt, [1999]
Micromolding behavior of engineering plastics
Oliver Kemmann, Carsten Schaumburg, Lutz Weber, [1999]
Microfabrication technique for thick structure of metals and PZT
Toru Shimizu, Yoichi Murakoshi, Zhanjie Wang, Ryutaro Maeda, Toshio Sano, [1999]
Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys
David Allen, Sue Impey, Remi Robin, Tom Chen, [1999]
Examples of MEMS technologies resulting in industrial transfers
Jean-Sebastian Danel, Michel Borel, Marie-Therese Delaye, Bernard Diem, Hubert Grange, France Michel, Patrice Rey, Sylvie Viollet-Bosson, [1999]
Optimum doses and mask thickness for synchrotron exposure of PMMA resists
Stewart Griffiths, Jill Hruby, Aili Ting, [1999]
X-ray transmission lenses by deep x-ray lithography and LIGA technique: first results and fundamental limits
Roland Kupka, Faycal Bouamrane, Marc Roulliay, Stephan Megtert, [1999]
New pattern on fabrication of fiber spinnerets by LIGA technology
Shi Chang Tseng, C. Shi, Chia-Lung Kuo, Yu-chiao Cheng, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) LIGA (cont.)
Construction and manufacturing of a microgearhead with 1.9-mm outer diameter for universal application
Christian Thuerigen, Ulrich Beckord, Reiner Bessey, [1999]
3D Microfabrication
Precision machining using UV and ultrashort-pulse lasers
Hans Toenshoff, Ferdinand von Alvensleben, Andreas Ostendorf, Guido Willmann, Thilo Wagner, [1999]
Production of novel 3D microstructures using excimer laser mask projection techniques
Nadeem Rizvi, [1999]
Microstereolithography using a dynamic mask generator and a noncoherent visible light source
Serge Monneret, Virginie Loubere, Serge Corbel, [1999]
Processing of complex microsystems: a micro mass spectrometer
Peter Siebert, G. Petzold, Joerg Mueller, [1999]
Microfabrication of biofactory-on-a-chip devices using laser ablation technology
Mark Talary, Julian Burt, Nadeem Rizvi, Phil Rumsby, Ron Pethig, [1999]
Sensors, Electronic Devices, and Actuators
Design, test, and simulation of self-assembled micromachined rf inductors
Peter Gammel, Bradley Barber, Victor Lubecke, Nathan Belk, M. Frei, [1999]
Design and realization of a penny-shaped micromotor
Matthias Nienhaus, Wolfgang Ehrfeld, H. Stoelting, Frank Michel, S. Kleen, S. Hardt, Felix Schmitz, T. Stange, [1999]
Silicon UV flame detector utilizing photonic crystals
Zoran Djuric, Tatjana Dankovic, Zoran Jaksic, Danijela Randjelovic, Radomir Petrovic, Wolfgang Ehrfeld, Andreas Schmidt, Klaus Hecker, [1999]
Integrated multicolor detector utilizing 1D photonic bandgap filter with wedge-shaped defect
Zoran Jaksic, Radomir Petrovic, Danijela Randjelovic, Tatjana Dankovic, Zoran Djuric, Wolfgang Ehrfeld, Andreas Schmidt, Klaus Hecker, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) MOEM Devices
Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters
Alain Spisser, Philippe Regreny, Christian Seassal, Jean Louis Leclercq, Pierre Viktorovitch, [1999]
High-spatial-frequency grating technology for microsystem applications
Olivier Parriaux, Florent Pigeon, Y. Jourlin, Alain Mure-Ravaud, Alexandre Tishchenko, [1999]
Polymeric optical MEMS
Jens Hossfeld, Thomas Paatzsch, Jens Schulze, Michel Neumeier, Lutz Weber, Hans-Dieter Bauer, Wolfgang Ehrfeld, [1999]
Optical microsystems with microchip lasers and micro-optics
Laurent Fulbert, Engin Molva, Jeannine Marty, Philippe Thony, Marc Rabarot, Bernard Ferrand, [1999]
Patrick Mottier, Eric Ollier, Patrick Pouteau, Karine Petroz, Sylvie Jarjayes, [1999]
Assembly and Production Techniques
Flip-chip integration of lenslet arrays on segmented deformable micromirrors
Adisorn Tuantranont, Victor Bright, Wenge Zhang, Y. Lee, [1999]
Chip-level three-dimensional assembling of microsystems
Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, [1999]
Conventional micromachining for microassembly applications
Ramona Eberhardt, A. Gebhardt, Torsten Scheller, [1999]
Handling and assembly of functionally adapted microcomponents (HAFAM): a European network
Gordana Popovic, Werner Brenner, Helmut Detter, [1999]
Poster Papers: Micromachining and Microfabrication
Characterization of on-chip coils for rf microsystems
Marcus Weser, Josef Binder, Sven Rehfuss, Rainer Laur, [1999]
Electrostatically driven micromachined nickel resonators and gyroscopes
Olaf Renken, Wolfgang Benecke, [1999]
Multichannel arrays on polymer substrates: toward a disposable proteomics chip
Holger Becker, Wolfgang Ehrfeld, Rainer Pommersheim, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) Poster Papers: Micromachining and Microfabrication (cont.)
High-precision positioning stage for microassembly purposes
Manfred Weck, Bernd Petersen, [1999]
Infrastructure for microsystem production
Henne van Heeren, Stefan Sanchez, Job Elders, Rene Heideman, [1999]
Micromachined capacitive electret microphone
Christiane Thielemann, Gisela Hess, [1999]
Multimode frequency analysis for the dynamic characterization of microstructures
Christian Bergaud, L. Nicu, A. Martinez, P. Gerard, M. Benzohra, [1999]
Laser diode wavelength locking using a micromachined silicon mirror
Neila Kaou, Cedrick Chappaz, Skandar Basrour, Michel de Labachelerie, [1999]
Optical pressure sensor head fabrication using ultrathin silicon wafer anodic bonding
Michael Beggans, Dentcho Ivanov, Steven Fu, Thomas Digges, Kenneth Farmer, [1999]
Silicon carbide-aluminum nitride: new high-stability composition for MEMS
Victor Luchinin, Andrey Korlyakov, Alexander Vasil'ev, [1999]
Micro-EDM for silicon microstructure fabrication
Xiaozhong Song, Dominiek Reynaerts, Wim Meeusen, Hendrik Van Brussel, [1999]
Optical fiber switching device with active alignment
Yves-Alain Peter, Hans-Peter Herzig, Stefano Bottinelli, [1999]
Microstereolithography: a new process to build complex 3D objects
Laurence Beluze, Arnaud Bertsch, Philippe Renaud, [1999]
Fabrication of MEMS using liquid jet dispensing technique
Sergey Sarkisov, Abdalla Darwish, Hossin Abdeldayem, Grigory Adamovsky, Mykola Kulishov, Curtis Banks, JaChing Wang, [1999]
Laser-micromachined and laminated microfluidic components for miniaturized thermal, chemical, and biological systems
Peter Martin, Dean Matson, Wendy Bennett, Donald Stewart, Yuehe Lin, [1999]
Backside contacts for sensor structure packaging
Barbara Janyszek, Ryszard Jachowicz, Dorota Pijanowska, Jerzy Jazwinski, [1999]

Design, Test, and Microfabrication of MEMS and MOEMS (cont.) Poster Papers: Micromachining and Microfabrication (cont.)
Reactive ion etching of quartz and glasses for microfabrication
Patrick Leech, Geoffrey Reeves, [1999]
Fabrication of single-mode optical fiber ferrule mold insert with 12 channels
Hsiharng Yang, Michael Vasile, [1999]
Optical switch driven by giant magnetostrictive thin films
Sung Moon, Sang Lim, Sang Bae Lee, HoKwan Kang, Min Kim, Seok Han, Myung-Hwan Oh, [1999]
Measurement of surface profile of microstructure
Mingbao Zhou, Linbo Bai, Zhan Li, HanMin Yao, [1999]
Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining
Arvi Kruusing, Seppo Leppaevuori, Antti Uusimaki, Matti Uusimaki, [1999]
New method to design halftone mask for the fabrication of continuous microrelief structure
Jingqing Su, Jinglei Du, Jun Yao, Fuhua Gao, Yongkang Guo, Zheng Cui, [1999]
Experimentation of electrostatically actuated monochip micropump for drug delivery
Monique Dilhan, Josiane Tasselli, Daniel Esteve, Pierre Temple-Boyer, Henri Camon, Marc Anduze, Stephane Colin, [1999]
Microtechnology for fabrication of surface micromechanic devices based on a novel SiC-AlN composition
Victor Luchinin, Andrey Korlyakov, Givi Jandjgava, Stanislav Prosorov, Aleksander Solomatin, Anatoley Sorokin, Sergey Kucherkov, Leonid Severov, Valeriy Ponomarev, [1999]
Design, fabrication, and thrust prediction of solid propellant microthrusters for space application
Carole Rossi, N. Fabre, Veronique Conedera, Daniel Esteve, [1999]
Preliminary results on the use of mirrors for LIGA process
Stephan Megtert, Franz-Josef Pantenburg, Sven Achenbach, Roland Kupka, Juergen Mohr, Marc Roulliay, [1999]
Needle-shaped glucose sensor with multicell electrode fabricated by surface micromachining
Youn Tae Kim, Young-Yong Kim, Chi-Hoon Jun, [1999]
Thermal flow sensor with vacuum-sealed membrane fabricated by surface micromachining
Chi-Hoon Jun, Suk Kim, Dong-Seong Kwag, Youn Tae Kim, [1999]