A brief overview of plasma science in industry Aspects of
Transcript Of A brief overview of plasma science in industry Aspects of
Aspects of Plasma Processing: A brief overview of plasma science in industry
Plasma Laboratories
Matthew J. Goeckner
Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing
Plasma Laboratories
Matthew J. Goeckner
How some view plasma processing
raw materials in
plasma processor
finished product out
$
Plasma Laboratories
Matthew J. Goeckner
How plasma processing really works
raw materials in
plasma processor
finished product out
?¢
One desires to understand the process so as to improve the value of finished product
Plasma Laboratories
Matthew J. Goeckner
Plasma processing
plasma chemistry
plasma physics
surface chemistry
Every process is a complex interaction between • gas phase chemistry • plasma conditions • surface phase chemistry/conditions
Plasma Laboratories
Matthew J. Goeckner
Classic example
Silicon etching:
Silicon etch rate (Å/min)
XeF2 gas only
70
60
50
40
30
20
10
0
0
200
XeF2 gas and Ar+ beam
Ar+ beam only
400 600 800 1000
time (s)
Work of Coburn and Winters in “Glow Discharge Processes” by Chapman (Wiley, 1980) p317
Plasma Laboratories
Matthew J. Goeckner
Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing
Plasma Laboratories
Matthew J. Goeckner
Plasma Physics
The basic plasma physics can be examined using probes Langmuir probes give: • ne, Te, Vp, & Vf Probes are quick and simple and give general information
Certain details can only be obtained with more exotic diagnostic techniques
• laser-induced fluorescence, • e-beam • µwave interferometer, etc.
These other techniques are more difficult
Plasma Laboratories
Matthew J. Goeckner
Gas and Surface phase chemistry
To fully understand plasma processing one must understand the plasma and surface chemistry
The chemistry can be examined with the following
• FTIR spectroscopy • absorption spectroscopy • microwave spectroscopy • optical emission spectroscopy • laser-induced fluorescence • mass spectrometry • ellipsometry • etc.
Each has advantages and disadvantages
Plasma Laboratories
Matthew J. Goeckner
Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing
Plasma Laboratories
Matthew J. Goeckner
Plasma Laboratories
Matthew J. Goeckner
Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing
Plasma Laboratories
Matthew J. Goeckner
How some view plasma processing
raw materials in
plasma processor
finished product out
$
Plasma Laboratories
Matthew J. Goeckner
How plasma processing really works
raw materials in
plasma processor
finished product out
?¢
One desires to understand the process so as to improve the value of finished product
Plasma Laboratories
Matthew J. Goeckner
Plasma processing
plasma chemistry
plasma physics
surface chemistry
Every process is a complex interaction between • gas phase chemistry • plasma conditions • surface phase chemistry/conditions
Plasma Laboratories
Matthew J. Goeckner
Classic example
Silicon etching:
Silicon etch rate (Å/min)
XeF2 gas only
70
60
50
40
30
20
10
0
0
200
XeF2 gas and Ar+ beam
Ar+ beam only
400 600 800 1000
time (s)
Work of Coburn and Winters in “Glow Discharge Processes” by Chapman (Wiley, 1980) p317
Plasma Laboratories
Matthew J. Goeckner
Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing
Plasma Laboratories
Matthew J. Goeckner
Plasma Physics
The basic plasma physics can be examined using probes Langmuir probes give: • ne, Te, Vp, & Vf Probes are quick and simple and give general information
Certain details can only be obtained with more exotic diagnostic techniques
• laser-induced fluorescence, • e-beam • µwave interferometer, etc.
These other techniques are more difficult
Plasma Laboratories
Matthew J. Goeckner
Gas and Surface phase chemistry
To fully understand plasma processing one must understand the plasma and surface chemistry
The chemistry can be examined with the following
• FTIR spectroscopy • absorption spectroscopy • microwave spectroscopy • optical emission spectroscopy • laser-induced fluorescence • mass spectrometry • ellipsometry • etc.
Each has advantages and disadvantages
Plasma Laboratories
Matthew J. Goeckner
Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing
Plasma Laboratories
Matthew J. Goeckner