A brief overview of plasma science in industry Aspects of

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A brief overview of plasma science in industry Aspects of

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Aspects of Plasma Processing: A brief overview of plasma science in industry

Plasma Laboratories

Matthew J. Goeckner

Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing

Plasma Laboratories

Matthew J. Goeckner

How some view plasma processing

raw materials in

plasma processor

finished product out

$

Plasma Laboratories

Matthew J. Goeckner

How plasma processing really works

raw materials in

plasma processor

finished product out



One desires to understand the process so as to improve the value of finished product

Plasma Laboratories

Matthew J. Goeckner

Plasma processing

plasma chemistry

plasma physics

surface chemistry

Every process is a complex interaction between • gas phase chemistry • plasma conditions • surface phase chemistry/conditions

Plasma Laboratories

Matthew J. Goeckner

Classic example

Silicon etching:

Silicon etch rate (Å/min)

XeF2 gas only

70

60

50

40

30

20

10

0

0

200

XeF2 gas and Ar+ beam

Ar+ beam only

400 600 800 1000

time (s)
Work of Coburn and Winters in “Glow Discharge Processes” by Chapman (Wiley, 1980) p317

Plasma Laboratories

Matthew J. Goeckner

Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing

Plasma Laboratories

Matthew J. Goeckner

Plasma Physics
The basic plasma physics can be examined using probes Langmuir probes give: • ne, Te, Vp, & Vf Probes are quick and simple and give general information
Certain details can only be obtained with more exotic diagnostic techniques
• laser-induced fluorescence, • e-beam • µwave interferometer, etc.
These other techniques are more difficult

Plasma Laboratories

Matthew J. Goeckner

Gas and Surface phase chemistry
To fully understand plasma processing one must understand the plasma and surface chemistry
The chemistry can be examined with the following
• FTIR spectroscopy • absorption spectroscopy • microwave spectroscopy • optical emission spectroscopy • laser-induced fluorescence • mass spectrometry • ellipsometry • etc.
Each has advantages and disadvantages

Plasma Laboratories

Matthew J. Goeckner

Outline
1) Why study plasma processing? 2) Diagnostic tools used to study processes 3) Overview of some plasma processes 4) Overview of some processing discharges 5) Opportunities in plasma processing

Plasma Laboratories

Matthew J. Goeckner
GoecknerPlasma ProcessingStudy Plasma ProcessingToolsPlasma Processor